주요 특징

• 주사전자현미경(SEM), Metrology and Inspection 장비, TEM (투과전자현미경), SIMS(질량 분석기), NMR(자기 공명 분석기) 장비용 active piezoelectric 제진대
• 반도체 제조 공장(FAB), Nanotechnology 연구, Nanofabrication 시설 및 재료 연구
• 고유의 시리얼 구조를 적용
• Hard-Mount 기술을 채용하여 SEM 장비에 내장되어 있는 제진 시스템과 동시에 사용이 가능
• 고감도, 저주파수의 속도 센서를 사용하여 뛰어난 Active 제진 성능
• 시리얼 디자인과 piezoelectric 기술을 통해 0.6 - 150 Hz의 제진 대역폭과 2 Hz에서 90% 제진 성능
• 새롭게 개선된 DC-2020 digital controller
  • Dual-core processor, Ethernet port, USB serial port, Graphical User Interface (GUI)

Application

• 반도체 제조 공장(FAB), TEM (투과전자현미경), SIMS(질량 분석기), NMR(자기 공명 분석기) 등

Specifications

Active degrees of freedom	6
Active bandwidth	0.6 Hz - 150 Hz
Passive natural frequency	18 Hz vertical and horizontal
Effective active resonant frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at ≥2 Hz	≥90%
Settling time after a 10 lb (4.5 kg) step input (10:1 reduction)	0.3 sec
Internal noise	<0.1 nm RMS
Operating load range per isolator	Low capacity: 400-1100 lbs (182-500 kg) Med capacity: 900-2100 lbs (410-955 kg) Hi capacity: 1900-4500 lbs (864-2045 kg)
Stiffness (1000 lb / 454 kg mass, Med capacity isolator)	40,000 lb/in. (73 x 105 N/m)
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator	<0.02 μG broadband RMS

Isolator Design, Dimensions and Environmental and Utility Requirements

Environmental and safety	CE and RoHS compliant
Active isolation elements	Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload
Passive isolation element	single stiff isotropic elastomer (no compressed air supply required)
Vibration sensor elements	downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop	Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Isolator dimensions (WxDxH)	11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm
Isolator weight	75 lb (34 kg)
Operating temperature	50° - 90° F 10° - 32° C
Storage temperature	-40° - 130° F -40° - 55° C
Humidity	30 - 60%
System power requirements	100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant
Floor displacement	<480 μin. (12 μm) below 10 Hz
Isolator count per system	minimum of 3
Options	laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods

DC-2020 Controller Specifications

Dimensions (WxDxH)	19 x 8.5 x 1.75 in. 483 x 216 x 45 mm
Weight	6.3 lb (2.9 kg)
Processor	150/75 MHz dual core
Sampling rate	10 kHz
Analog outputs	16 channels
Analog inputs	16 channels
Status light	single LED
Front panel ports	1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC
Rear panel ports	1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
User interface	Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI